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Deposition and Etching
Aixtron
MOCVD systems, Atomic Layer Deposition, special deposition dedicated systems (SiGe, FeRAM, OLED, GaN...).
Veeco
ION Sourcers, DC-DC Hollow Cathode, Radio Frequency
Sentech
Plasma process technology for high precision etching and layer deposition in semiconductor and micro/nano applications :
PLASMA ETCHER - RIE - ICPRIE
PLASMA DEPOSITION - PECVD - ICPECVD
Lesker
Thin-film vacuum deposition systems , Vacuum chambers, Crystal Monitors to measure deposition rate and film thickness; Mass Flow Meters and Controllers for a variety of gasses and condensable vapors; and Power Supplies used for thin film processes includi
Laurell
Spin Coaters, Etching/Developing/Cleaning, Wet Stations, Rinser/Dryers
Diener
Plasma systems for cleaning, activation and deposition on surfaces in air and in vacuum